METHOD FOR DEPOSITING TRANSPARENT CONDUCTIVE FILM, TRANSPARENT CONDUCTIVE FILM DEPOSITED BY THE METHOD, AND ARTICLE HAVING THE TRANSPARENT CONDUCTIVE FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for depositing a transparent conductive film which has high safety, superior productivity, excellent permeability characteristics, superior electric properties, and excellent film adhesion to a base material composed of a plastic film and also to provide the transparent conductive film and an article having the transparent conductive film. ;SOLUTION: In the method for depositing the transparent conductive film in which, under the atmospheric pressure or a pressure in the vicinity of the atmospheric pressure, a gaseous mixture containing inert gas and reactive gas is introduced into an electrical discharge space between electrodes and formed into plasma state and the base material is exposed to the reactive gas in the plasma state to deposit the transparent conductive film onto the base material, the reactive gas is reducing gas or inorganic gas having at least one oxygen atom in a molecule.;COPYRIGHT: (C)2004,JPO