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Electronic device structures including interconnecting microfluidic channels
Electronic device structures including interconnecting microfluidic channels
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机译:电子设备结构,包括互连的微流体通道
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摘要
A structure and method of using microfluidic channels to form an array of semiconductor devices is described. The microfluidic channels have been found to be particularly useful when formed in a self aligned process and used to interconnect a series of thin film transistor (TFT) devices.
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