Micromechanical tunable capacitor and an integrated tunable resonator

摘要

An integrated tunable resonator for radio includes an RF resonator having a micromechanical tunable capacitor with high Q- (quality factor) value. A first conducting layer (4) forms the first capacitor electrode (8), and/or the electrodes (9) to create the electrostatic force on a movable micromechanical structure (2), and the interconnecting wire (10) between the inductor coil (1) and the capacitor electrode. This arrangement with the use of a dielectric insulating layer provides a substantial improvement to the linearity, power consumption, occupation space and reliability of RF resonator circuits.