Device for detecting a change in a coating, device for detecting cleaning progress in an installation to be cleaned and method for controlling a cleaning progress of coatings on a working member

摘要

Device for measuring deposition thickness variations comprises the following: an inter-digital-capacitor (10) with an outer surface (30a) on which a coating can be deposited such that the capacitor impedance varies with the deposition layer thickness; an impedance measurement device; and an evaluation unit for indicating the change over time of the layer thickness. The invention also relates to a corresponding method for control of a cleaning method using an inventive deposition thickness measurement device.