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METHOD OF MAKING HIGH REPETITION RATE EXCIMER LASER CRYSTAL OPTICS AND UV-200NM TRANSMITTING OPTICAL FLORIDE CRYSTAL
METHOD OF MAKING HIGH REPETITION RATE EXCIMER LASER CRYSTAL OPTICS AND UV-200NM TRANSMITTING OPTICAL FLORIDE CRYSTAL
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机译:制作高重复率准分子激光光学和紫外-200NM透射光学氟化物晶体的方法
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摘要
The invention relates to an High Repetition Rate UV Excimer Laser which includes a source of a laser beam and one or more windows which include magnesium fluoride. Another aspect of the invention relates to an excimer laser which includes a source of a laser beam, one or more windows which include magnesium fluoride and a source for annealing the one or more windows. Another aspect of the invention relates to a method of producing a predetermined narrow width laser beam.
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