ion beam e-beam have a ion beam assisted e-beam evaporator made platictype display panel a manufacturing process

摘要

PURPOSE: A flat display device and method for manufacturing the same is provided to obtain a transparent conductive film having superior characteristics, while simplifying manufacturing processes and costs. CONSTITUTION: An ion gun for generating ion beams for ionizing gases like argon or oxygen and auxiliary beams for evaporating oxides like indium tin oxide, SnO2 and ZnO, is installed in an ion beam evaporator. A substrate made of a resin family including polymethyl methacrylate, polycarbonite and polyester, is embedded within the ion beam evaporator. A pattern mask produced through a PVD process is attached onto the substrate made of a resin family, and an evacuation process is performed by using a vacuum pump such that the internal pressure is 1 x 10¬-5 torr or lower. A transparent conductive film having a surface resistance of 10¥Ø/cm to 1K¥Ø/cm and a light transmittance of 80 percents or higher, is formed onto the substrate at a temperature lower than 100 Deg.C by the electron beam for evaporating oxides like indium tin oxide, SnO2 and ZnO and ion beam for ionizing gases like argon or oxygen.