首页> 外国专利> METHOD FOR PROCESSING SAMPLE IMAGE DATA, METHOD FOR EXAMINING SAMPLE, SYSTEM FOR EXAMINING SAMPLE INCLUDING IMAGE DATA CREATION AND STORAGE UNIT FOR CREATING AND STORING IMAGE DATA OF PLURAL LAYERS HAVING DIFFERENT SAMPLE DEPTHS

METHOD FOR PROCESSING SAMPLE IMAGE DATA, METHOD FOR EXAMINING SAMPLE, SYSTEM FOR EXAMINING SAMPLE INCLUDING IMAGE DATA CREATION AND STORAGE UNIT FOR CREATING AND STORING IMAGE DATA OF PLURAL LAYERS HAVING DIFFERENT SAMPLE DEPTHS

机译:用于处理样品图像数据的方法,用于检查样品的方法,用于检查样品的系统,包括用于创建和存储具有不同样品深度的多层图像数据的图像数据的创建和存储单元

摘要

PURPOSE: A method for processing sample image data and a system and a method for examining a sample are provided to quickly display image data including plural layers having different sample depths on a display unit by using the system for examining the sample. CONSTITUTION: A method for examining a sample is provided with a display layer setting step of setting a first condition of designating one layer image(42a) to be displayed on a specific terminal(41) by using image data(42) photographed for every plural layers having different sample depths from the sample. The method for examining the sample is provided with a display region setting step of setting a second condition of designating a prescribed planar region to be extracted from the layer image(42a) specified by the first condition. The method for examining the sample is provided with a first image display step of displaying the prescribed planar region extracted from the layer image(42a) on the specific terminal(41).
机译:目的:提供一种用于处理样本图像数据的方法以及一种用于检查样本的系统和方法,以通过使用用于检查样本的系统在显示单元上快速显示包括具有不同样本深度的多层的图像数据。构成:一种用于检查样本的方法,设有显示层设置步骤,该步骤通过使用每隔多个拍摄的图像数据(42)设置指定要在特定终端(41)上显示的一层图像(42a)的第一条件样品深度与样品不同的层。用于检查样本的方法设置有显示区域设置步骤,该显示区域设置步骤设置第二条件,该第二条件指定要从由第一条件指定的层图像(42a)提取的规定平面区域。用于检查样本的方法设置有第一图像显示步骤,该第一图像显示步骤在特定端子(41)上显示从层图像(42a)提取的规定平面区域。

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