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SEMICONDUCTOR DEVICE CAPABLE OF PLANNING DIMINUTION, COMPOSED OF MAIN SURFACE, FUSE FORMING REGION, AND BLOCKING LAYER HAVING RECESSED PARTS
SEMICONDUCTOR DEVICE CAPABLE OF PLANNING DIMINUTION, COMPOSED OF MAIN SURFACE, FUSE FORMING REGION, AND BLOCKING LAYER HAVING RECESSED PARTS
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机译:具有规划尺寸的半导体器件,由主要表面,保险丝形成区域和具有凹入部分的阻隔层组成
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摘要
PURPOSE: A semiconductor device is provided to reduce a reflection ray directed from a reflective surface to a region located apart from a fuse forming region in a horizontal direction by forming the reflective surface having recessed parts. CONSTITUTION: A semiconductor substrate(2) includes a main surface, a fuse forming region, and a blocking layer(12a). The fuse forming region is formed on the main surface and includes a plurality of fuses(16a) buried therein. The blocking layer is formed between the fuse forming region and the semiconductor substrate. The blocking layer prevents a laser ray from proceeding to a lower portion by reflecting the laser ray which was illuminated when the fuse is cut. The blocking layer includes a reflective surface which has a shape of recessed parts in order to reflect the laser ray. The blocking layer is overlapped with a substantially whole region of the fuse forming region in a planar view.
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