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APPLY DEVICE OF SOLUTION AND APPLY METHOD THEREOF, CAPABLE OF APPLYING SOLUTION IN ALMOST UNIFORM DISTRIBUTIVE STATE
APPLY DEVICE OF SOLUTION AND APPLY METHOD THEREOF, CAPABLE OF APPLYING SOLUTION IN ALMOST UNIFORM DISTRIBUTIVE STATE
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机译:解决方案的应用装置及其应用方法,能够在几乎一致的分配状态下应用解决方案
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摘要
PURPOSE: An apply device of a solution and an apply method are provided to remember plural nozzle positions installed on heads as coordinates data, and to control a discharge of a solution from each nozzle according to applied patterns of the solution and the coordinates data, thereby applying the solution in almost uniform distributive state. CONSTITUTION: Drivers(20) formed on each head(9) are controlled by a control device(21). X and Y coordinates of each nozzle formed on the heads(9) are remembered in the control device(21). The X and Y coordinates of the nozzles are set according to mounting positions of the heads(9) after mounting each head(9) on a mounting member. The control device(21) controls a driving of the drivers(20) according to applied patterns of a solution applied to a substrate, and operates piezoelectric elements corresponding to the nozzles for discharging the solution.
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