Compositions for forming Ba1-xSrxTiyO3 thin films and methods for forming Ba1-xSrxTiyO3 thin films

摘要

A metal salt of a carbonic acid represented by C _n H _{2n + 1} COOH (where 3? N? 7) as a raw material for Ba and Sr raw material and a carbonic acid salt capable of having the structure of the following general formula (I) Composition for forming a thin film of Ba _1-x Sr _x Ti _y O ₃ .;In this formula,;R ¹ , R ² , R ³ , R ⁴ , R ⁵ and R ⁶ are hydrogen, a methyl group or an ethyl group,;M is Ba or Sr.;The composition for forming a thin film of Ba _1-x Sr _x Ti _y O _{3 in which} barium carbonate, strontium carbonate, and titanium alkoxide are mixed with a mixed solvent of a carbonic acid ester has a ratio of the mixed solvent of 2 to 11 times the molar amount of Ti .;As the Ba and Sr sources, ^a carbonic acid salt of R ^a COOH (where R ^a is ^a linear or branched alkyl group having 3 to 7 carbon atoms) is used, and Ti (OR ⁶ ) ₄ (where R ^b is a having 1 to 7 uijik-chain or branched alkyl group), a _{Ba 1-x Sr x Ti y} O 3 compositions used for forming a thin film.