首页> 外国专利> Production of an anti-fuse structure in a substrate used in integrated circuits comprises forming a conducting region and a non-conducting region in the substrate to form an edge of the conducting region, and depositing a dielectric layer

Production of an anti-fuse structure in a substrate used in integrated circuits comprises forming a conducting region and a non-conducting region in the substrate to form an edge of the conducting region, and depositing a dielectric layer

机译:在用于集成电路的基板中制造反熔丝结构的步骤包括在基板中形成导电区域和非导电区域以形成导电区域的边缘,以及沉积介电层。

摘要

Production of an anti-fuse structure in a substrate comprises forming a conducting region (1) and a non-conducting region (2) in the substrate to form a common surface and an edge (3) of the conducting region, and depositing a dielectric layer (4) so that a part of this edge is covered. An Independent claim is also included for an anti-fuse structure produced by the above process.
机译:在基板中产生反熔丝结构的步骤包括在基板中形成导电区域(1)和非导电区域(2)以形成导电区域的公共表面和边缘(3),以及沉积电介质层(4),以便覆盖此边缘的一部分。通过上述方法生产的反熔丝结构也包括独立权利要求。

著录项

  • 公开/公告号DE10255425A1

    专利类型

  • 公开/公告日2004-06-17

    原文格式PDF

  • 申请/专利权人 INFINEON TECHNOLOGIES AG;

    申请/专利号DE2002155425

  • 发明设计人 LINDOLF JUERGEN;SCHAMBERGER FLORIAN;

    申请日2002-11-28

  • 分类号H01L21/768;H01L23/525;

  • 国家 DE

  • 入库时间 2022-08-21 22:43:44

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