Interference-optical shape measurement device with phase shifting has interferometer producing interference patterns from specified measurement areas, phase shift element array and adjustment device

摘要

The device has an interferometer producing interference patterns from workpiece surface measurement areas, phase shift elements allocated to measurement areas and an adjustment device with which the workpiece and interferometer can be adjusted relative to each other in a direction enabling an association of a measurement area with different phase shift elements to enable each area on the workpiece to be sensed a number of times. The device (3) has an interferometer (2) for essentially simultaneously producing interference patterns from several specified measurement areas of the workpiece (5) surface (4), a fixed array of phase shift elements (35) allocated to the measurement areas that cause defined different displacements of the interference patterns and an adjustment device (8) with which the workpiece and interferometer can be adjusted relative to each other in a direction enabling an association of a measurement area with different phase shift elements to enable each area on the workpiece to be sensed a number of times. AN Independent claim is also included for the following: (a) a method of interference optical measurement or checking of the properties of surfaces of a workpiece.