Lens system for laser pulses provides partial beams imaged onto illumination field with relative time offset for preventing interference

摘要

The lens system has a first lens array with a number of lenses (16), dividing the incident pulsed laser beam (12) into a number of partial beams and an imaging lens (26) using the received partial beams for uniform illumination of an illumination field (28). The partial beams are received in time offset by the illumination field, e.g. by insertion of optical elements (24) in partial beam light paths for altering their path lengths.