System for measuring polarization of light, comprises unit which collects data from four photo-detectors on four paths provided by two dividers, three Glan-Thomson prisms and quarter wave plate

摘要

Incident light (101) is divided (102) into equal beams with the incident polarization. One passes through a Glan-Thomson prism (104) to produce two orthogonal polarized beams arriving at photo-detectors (105,106). The second is divided (103) and the divided beams reach photo-detectors (108,111) after passing through a Glan-Thomson 45 degree prism (107), and quarter wave plate (109) and Glan-Thomson 45 degree prism (110) Independent claims are also included for the following : 1) A display equipment with reticule which uses the optical system 2) Equipment for the optical system including dividers and prisms 3) Method for using the optical system in the fabrication of integrated semiconductor circuits