FEEDER OF HALOGEN GAS OR HALOGEN-CONTAINED GAS

摘要

PROBLEM TO BE SOLVED: To provide a gas feeder and a gas feeding method, supplying gaseous fluorine to a supply destination inexpensively and safely.;SOLUTION: This gas feeder 1 is provided with: a storing tank 2 storing gaseous fluorine; a pressurization device 3 for pressurizing gaseous fluorine in the storing tank 2; and a press-in storing tank 4 where gaseous fluorine is pressed in from the pressurization device 3, wherein the gaseous fluorine can be supplied from the gas feeder 1 storing the gaseous fluorine to the supply destination, whereby it is not necessary to replace the gas supply source such as a gas cylinder so that the labor and time and the cost for work can be saved. Accordingly, the gaseous fluorine can be supplied to the supply destination inexpensively and safely.;COPYRIGHT: (C)2005,JPO&NCIPI