FIB DEVICE FOR TEM SAMPLE PROCESSING EQUIPPED WITH FUNCTION FOR AUTOMATICALLY RECOGNIZING BENDING

摘要

PROBLEM TO BE SOLVED: To provide a technology capable of TEM sample automatic finishing by being equipped with a function for recognizing automatically a bending phenomenon generated in TEM sample processing by an FIB device.;SOLUTION: In a bending automatic recognition method in the TEM sample processing, secondary electron detection is performed by a secondary charged particle detector at a thinning time of the TEM sample, and the sample is determined to be bent when detecting a sudden change in a detection signal. In a TEM sample processing method, the secondary electron detection is performed by the secondary charged particle detector at the thinning time of the TEM sample, and the sample is determined to be bent when detecting the sudden change in the detection signal, and thinning is discontinued. Cutting by the FIB is performed to straighten the bending, and thinning is proceeded in this state.;COPYRIGHT: (C)2005,JPO&NCIPI