PIEZOELECTRIC OSCILLATING PIECE, METHOD FOR MANUFACTURING PIEZOELECTRIC OSCILLATING PIECE, PIEZOELECTRIC OSCILLATOR, OSCILLATORY GYROSCOPE, AND METHOD FOR MANUFACTURING PIEZOELECTRIC OSCILLATOR AND OSCILLATORY GYROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric oscillating piece which is downsized and excellent in mass-productivity and can obtain a stable resonant frequency, its manufacturing method, piezoelectric oscillator comprising said piezoelectric oscillating element, and oscillatory gyroscope.;SOLUTION: In piezoelectric oscillating pieces 100, 200 formed from a wafer 1 composed of a piezoelectric material by photo-lithography, a sheet-like link part 12 is formed to link a part of the piezoelectric oscillating pieces 100, 200 and a frame 11 of the wafer formed around these piezoelectric oscillating pieces, and at least one surface of the link part 12 is pierced with a recessed part 14 or 15 of which the cross section is approximately V-shaped, linearly in the direction of width of the link part 12. The piezoelectric oscillating pieces 100, 200 are formed away from the wafer 1 in the recessed part 14 or 15, thereby providing an oscillatory gyroscope 400 and a piezoelectric oscillator 500 stored within a package.;COPYRIGHT: (C)2005,JPO&NCIPI