Being the manner which regenerates the ion sucking/absorbing film deposition which is used in the regenerative manner of ion sucking/absorbing film deposition

摘要

PROBLEM TO BE SOLVED: To regenerate an ion adsorbing membrane by providing a process for removing impurities caught in the used membrane with a regeneration chemical liquid and a process for rinsing with cleaning water and using ultrapure water as regeneration chemical liquid preparing water and the cleaning water which are used in the impurity removing process. ;SOLUTION: A method for regenerating an ion adsorbing membrane which is used just before the use point of an ultrapure water producing apparatus has a process for removing impurities caught in the used membrane with a regeneration chemical liquid and a process for rinsing with cleaning water. In this method, ultrapure water is used as regeneration chemical liquid preparing water and the cleaning water. The membrane is a porous membrane in which polymer chains having an ion exchange function in the membrane are preserved. The porous membrane contains 0.2-10 meq of ion exchange groups per 1 g of the membrane and has an average pore diameter of 0.01-1 μm. The membranes are packed in a proper column to be used as an ion adsorbing membrane module.;COPYRIGHT: (C)1999,JPO