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And method of manufacturing the exchange coupling film, method of manufacturing a magneto-resistance effect element using the exchange coupling film and method of manufacturing a thin film magnetic head using the magneto-resistance effect element,
And method of manufacturing the exchange coupling film, method of manufacturing a magneto-resistance effect element using the exchange coupling film and method of manufacturing a thin film magnetic head using the magneto-resistance effect element,
An exchange coupling film includes a first antiferromagnetic layer formed on a pinned magnetic layer, and a second antiferromagnetic layer formed thereon. A composition ratio of an element X in the first antiferromagnetic layer is larger than that of the second antiferromagnetic layer. Preferably, a non-aligned state is created at an interface between the first antiferromagnetic layer and the pinned magnetic layer, whereby a large exchange coupling magnetic field is obtained upon heat-treatment.
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