Abatement method of reactive fluorine-based gas and abatement processing agent of reactive fluorine-based gas

摘要

PROBLEM TO BE SOLVED: To provide a detoxifying treatment which is enhanced in the detoxification treatment ability for a reactive fluorine-based gas and to provide a process for the detoxification of a reactive fluorine-based gas. ;SOLUTION: The detoxifying treatment for a reactive fluorine-based gas and the process for the detoxification of a reactive fluorine-based gas are such that the detoxifying treatment M0 is formed by contacting a treatment M having the main component of calcium hydroxide filled in a packed column 1, with a nitrogen-containing gas Ng such as N₂, a CO₂-containing N₂ gas, a dry air and the atmosphere, and thereafter the packed column (1) is subjected to the introduction of a gas Fg to be treated in order for the above detoxifying treatment M0 to contact with the gas Fg treated containing a reactive fluorine-based gas, for example which is used in and discharged from a semiconductor manufacture, consequently to detoxify the reactive fluorine-based gas and to discharge it as a blowdown gas F0.;COPYRIGHT: (C)2003,JPO