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After being formed on the piezoelectric body membrane and the particular piezoelectric body membrane which were formed on
After being formed on the piezoelectric body membrane and the particular piezoelectric body membrane which were formed on
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机译:在形成于压电体膜上之后,以及形成于其上的特定压电体膜上
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摘要
A piezoelectric device comprises: a lower electrode; a piezoelectric film formed on the lower electrode; and an upper electrode formed on the piezoelectric film, wherein a low dielectric material having a dielectric constant that is lower than the piezoelectric film is formed at grain boundary exposed regions of the piezoelectric film. IMAGE
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