Apparatus and method for inspecting interface between ground layer and substrate of microstrip by using scattering parameters

摘要

An apparatus and method for detecting a defect on a ground layer of microstrip by using scattering parameters is disclosed. The apparatus includes: a providing unit for providing a signal to the microstrip by changing a frequency of the signal in a predetermined range of frequencies; a detecting unit for detecting scattering parameters of an output signal from the microstrip in response to the frequency of the signal; and an analyzing unit for analyzing the interface based on the scattering parameters.