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Rapid method and indirect measurement of thickness of polymeric films that do not contain elements that absorb X-rays using X-ray fluorescence spectrometry and energy dispersive (DXRF)

机译:使用X射线荧光光谱和能量色散(DXRF)快速方法和间接测量不包含吸收X射线元素的聚合物膜的厚度

摘要

"Rapid method and indirect measurement of thickness of polymeric films that do not contain elements that absorb X-rays using X-ray fluorescence spectrometry of energy dispersive (EDXRF) ". Invention patent that describes the development of a rapid method and indirect measurement of thickness of polymeric films using X-ray fluorescence spectrometry.In the method are used as the metallic shielding films and is a measure of the attenuation of the emission line of the element of the bulkhead.After the introduction of the attenuation values in a calibration equation previously obtained for that movie, is given its actual thickness.The metallic shielding used were lead, copper and aluminum. The measures showed that the method is fast, these being carried out in 100 seconds during the process of irradiation.The values of correlation coefficients of the analytical curves obtained showed that the technique is promising (r up to 1).The limits of detection achieved (LD ranging from 0.043 to 4.04 109 m) showed values applicable to real samples, particularly those with industrial interest.
机译:“使用能量色散(EDXRF)的X射线荧光光谱法,快速方法和间接测量不包含吸收X射线元素的聚合物膜厚度的方法”。该发明专利描述了快速方法的发展以及使用X射线荧光光谱法间接测量聚合物膜的厚度的方法。该方法用作金属屏蔽膜,是衡量金属元素发射线衰减的量度在先前为该电影获得的校准方程式中引入衰减值后,给出其实际厚度。所用的金属屏蔽层为铅,铜和铝。测量结果表明该方法是快速的,在辐照过程中可在100秒内完成。所获得的分析曲线的相关系数值表明该技术是有前途的(最高可达1)。 (LD为0.043至4.04 <109> m)显示适用于真实样品的值,尤其是具有工业价值的样品。

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