APPARATUS AND METHOD FOR TRANSFERRING A SUBSTRATE TO TRANSFER A LARGE SIZED SUBSTRATE WITHOUT THE INCREASE OF THE HEIGHT OF A VACUUM TREATMENT ROOM AND AN APPARATUS FOR A VACUUM TREATMENT

摘要

PURPOSE: An apparatus and a method for transferring a substrate and an apparatus for a vacuum treatment are provided to transfer a large sized substrate without the increase of the height of a vacuum treatment room, thereby preventing the decrease of the throughput of the substrate treatment due to the increase of the room volume. CONSTITUTION: An apparatus for transferring a substrate comprises a substrate support plate(74) and a plurality of arm plates(72,73,74) capable of sliding the next above plate. The arm plates are laminated under the substrate support plate to have a multistage type. Each arm plate has an opening in the upper portion and a driving unit for sliding the slide plate is installed in the opening. The driving unit has a set of pulleys and belt, wherein the portion of the belt is connected to the next above plate. The support plate and the arm plates are extended in a horizontal direction from a vacuum treatment room to a substrate treatment room by the motion of each driving unit.