MICROELECTROMECHANICAL SYSTEM DEVICES HAVING INTEGRATED MICROMIRROR DEVICE AND DRIVE CIRCUIT FOR THE MICROMIRROR DEVICE AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A MEMS(MicroElectroMechanical Systems) device and a manufacturing method thereof are provided to integrate a micromirror device and a drive circuit for the micromirror device effectively. CONSTITUTION: A MEMS(MicroElectroMechanical Systems) device includes a substructure(200), a dielectric layer, a protective layer, an actuating element, and an aperture. The substructure has a base material(210) and at least one conductive layer(220) formed on a first side of the base material. The dielectric layer is formed over the at least one conductive layer of the substructure. The protective layer is formed on the dielectric layer. The actuating element is implemented over the protective layer. The aperture is formed through the protective layer and the dielectric layer to the at least one conductive layer of the substructure.