首页> 外国专利> ELECTRON EMISSION DEVICE, ELECTRON SOURCE, AND METHOD FOR FABRICATING IMAGE DISPLAY DEVICE TO REDUCE VARIATION OF LUMINANCE ON DISPLAY SCREEN AND PREVENT MIXTURE OF COLORS

ELECTRON EMISSION DEVICE, ELECTRON SOURCE, AND METHOD FOR FABRICATING IMAGE DISPLAY DEVICE TO REDUCE VARIATION OF LUMINANCE ON DISPLAY SCREEN AND PREVENT MIXTURE OF COLORS

机译:电子发射装置,电子源和制造图像显示装置以减少显示屏幕上亮度变化和防止颜色混合的方法

摘要

PURPOSE: An electron emission device, an electron source, and a method for fabricating an image display device are provided to reduce a variation of luminance on a display screen by controlling the opening width of a focusing electrode and increasing process margin and to prevent mixture of colors by uniformly diffusing electron beams. CONSTITUTION: The first conductive layer is formed on a substrate. A layer including at least one material composing an electron-emitting substance is formed on the first conductive layer. A protection layer is formed on the layer. The second conductive layer is formed on the protection layer. An insulating layer is formed on the second conductive layer, and the third conductive layer is formed on the insulating layer. An opening is formed from the surface of the third conductive layer to the protection layer using dry etching. The protection layer is selectively etched through the opening to partially expose the layer including the material composing the electron-emitting substance.
机译:目的:提供一种电子发射装置,电子源和制造图像显示装置的方法,以通过控制聚焦电极的开口宽度和增加工艺裕度来减少显示屏上的亮度变化,并防止混合现象。通过均匀地扩散电子束而产生颜色。组成:第一导电层形成在基板上。在第一导电层上形成包括至少一种构成电子发射物质的材料的层。在该层上形成保护层。在保护层上形成第二导电层。在第二导电层上形成绝缘层,并且在绝缘层上形成第三导电层。使用干蚀刻从第三导电层的表面到保护层形成开口。通过开口选择性地蚀刻保护层,以部分地暴露包括构成电子发射物质的材料的层。

著录项

  • 公开/公告号KR20040108532A

    专利类型

  • 公开/公告日2004-12-24

    原文格式PDF

  • 申请/专利权人 CANON KABUSHIKI KAISHA;

    申请/专利号KR20040006415

  • 发明设计人 TERAMOTO YOJI;

    申请日2004-01-31

  • 分类号H01J1/30;

  • 国家 KR

  • 入库时间 2022-08-21 22:06:21

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