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ELECTRON EMISSION DEVICE, ELECTRON SOURCE, AND METHOD FOR FABRICATING IMAGE DISPLAY DEVICE TO REDUCE VARIATION OF LUMINANCE ON DISPLAY SCREEN AND PREVENT MIXTURE OF COLORS
ELECTRON EMISSION DEVICE, ELECTRON SOURCE, AND METHOD FOR FABRICATING IMAGE DISPLAY DEVICE TO REDUCE VARIATION OF LUMINANCE ON DISPLAY SCREEN AND PREVENT MIXTURE OF COLORS
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机译:电子发射装置,电子源和制造图像显示装置以减少显示屏幕上亮度变化和防止颜色混合的方法
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摘要
PURPOSE: An electron emission device, an electron source, and a method for fabricating an image display device are provided to reduce a variation of luminance on a display screen by controlling the opening width of a focusing electrode and increasing process margin and to prevent mixture of colors by uniformly diffusing electron beams. CONSTITUTION: The first conductive layer is formed on a substrate. A layer including at least one material composing an electron-emitting substance is formed on the first conductive layer. A protection layer is formed on the layer. The second conductive layer is formed on the protection layer. An insulating layer is formed on the second conductive layer, and the third conductive layer is formed on the insulating layer. An opening is formed from the surface of the third conductive layer to the protection layer using dry etching. The protection layer is selectively etched through the opening to partially expose the layer including the material composing the electron-emitting substance.
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