APPARATUS OF SUPPORTING AND LEVELING FOCUS RING SURROUNDING CHUCK FOR PREVENTING ERROR DUE TO MISALIGNMENT OF FOCUS RING BY STABLY MAINTAINING FOCUS RING IN LEVELING STATE

摘要

Purpose: supporting and degradates and surrounds a device of a focus ring of collet and be arranged to the deviation for preventing a mistake due to focus ring by the focus ring being stably maintained in a level state. Construction: a focus ring (150) is introduced into around collet, in order to agglomerate on plasma a to chip. One screw (200) is for degradating and supporting focus ring. One support sector (300) has a slot of wherein screw insertion. One spring (250) is in order to steadily maintain the inserting state being screwed into be inserted into screw slot by by the power of setscrew to screw. Multiple washers (230) are inserted into screw, in order to repair screw.