SEMICONDUCTOR DEVICE CAPABLE OF FINDING REQUIRED ANALYSIS POINT EASILY BY USING DFA(DESIGN FOR ANALYSIS)

摘要

PURPOSE: A semiconductor device is provided to find easily a required analysis point in a reference plane by indication patterns those are arranged regularly. CONSTITUTION: A semiconductor device is provided to easily find a required analysis point includes a semiconductor substrate, dummy patterns and patterns for indicating. The dummy patterns located in highest level for a chemical mechanical polishing are repeatedly arranged on the semiconductor substrate. The patterns for indicating are arranged at every interval among the dummy patterns of predetermined pieces. The patterns for indicating are formed in a different layout from the dummy patterns.