Method for uniformizing a neutron magneticflux to the radial direction in the neutron transmutation doping technology

摘要

The present invention relates to a method according to the neutron conversion doping technique, to equalize the neutron flux between the center and the peripheral portion of the silicon ingot equalize the neutron flux in accordance with the radial direction of suitable silicon ingot, a predetermined gap between a plurality of silicon ingots leave to the neutron flux between the center and the peripheral portion of the silicon ingot is characterized in that uniform after inserting a plurality of neutron scattering layer is irradiated with neutrons in a nuclear reactor by neutron scattering by the neutron scattering layer. Accordingly, the present invention is inserted between the silicon ingot can be through the neutron scattering of the neutron scattering layer for delivering the neutron to the center silicon ingot equalize the neutron flux between the center and the peripheral portion of the silicon ingot's high quality high power single-crystal silicon for semiconductor devices the can be prepared.