Production of large-surface, micro-structured elements, e.g. X-ray detectors, involves depositing vertical crystals, filling the spaces with another substance, removing crystals and filling the cavities with a third substance

摘要

Large-surface, microstructured functional elements are produced by depositing a substance (2) on a substrate to form a matrix with interstitial spaces, filling the spaces with a different substance (4), selectively removing (2) and filling the resulting cavities with a third substance (6). A method for the production of large-surface, micro-structured functional elements involves (a) making a matrix by depositing a first substance (2) on a substrate (1) to form a given structure with interstitial spaces (3), (b) filling the spaces (3) with a second substance (4) which differs from (2) in at least one property, (c) selectively removing (2) by using the different property(ies) and (d) filling the resulting cavities (5) with a third substance (6).