Piezoelectric actuator, e.g. for operating mechanical component, has actuator part piezo layers, sensor piezo layers integrated into one component so individual sensor piezo layers are at defined intervals between actuator piezo layers

摘要

The device (1) has a multi layer structure of piezo layers perpendicular to the working direction (6,7), internal electrodes (2,3) between the piezo layers for operating the actuator when an external voltage is applied via external electrodes and further piezo layers with internal electrodes (8,9) from which a sensor signal proportional to the operation of the actuator is tapped via further external electrodes (10,11). The piezo layers for the actuator part and the piezo layers for the sensor part are integrated into one component so that individual sensor piezo layers are arranged at defined intervals between actuator piezo layers.