Micromechanical component for use in e.g. thermal acceleration sensor, has cavern formed in substrate, and membrane removed from component through cavern, where cavern is closed at rear side of substrate through foil

摘要

The component (11) has a membrane (4) that is realized in a layer composition on a substrate. A cavern (5) is formed in the substrate, where the membrane is removed from the component through the cavern. The cavern is closed at a rear side of the substrate through a foil (6). The foil is provided with two gluing layers (7, 8), and is gas permeable, so that an exchange of gas takes place between the closed cavern and environment. Independent claims are also included for the following: (A) a method for manufacturing a micromechanical component with a membrane (B) an usage of a micromechanical component.