Firmly joining sensor workpiece to body component to form vacuum sensor for structural health monitoring involves laminating transfer contact adhesive layer to sensor contact surface, and using laser lithography to transfer gallery patterns

摘要

Firmly joining a sensor workpiece (1) to a body component (2) involves laminating a cross-linked transfer contact adhesive layer (5) to a sensor contact surface (4) of the workpiece; using laser lithography for transferring geometric patterns of galleries (6) arranged in laminar fashion to the contact surface by a laser beam penetrating the adhesive; and introducing the geometric patterns in workpiece and removing them congruently with structures of adhesive layer. An independent claim is included for a vacuum sensor manufactured using the inventive method.