one -, two - and three-dimensional massverk amp; all; rperungen physical gr amp; all; amp; w; e, l amp; auml; nge with combined optical and tactile antastbaren messfl amp; auml; chen, with systematic ma amp; white; reference of both antastverfahren

摘要

a,two - and three-dimensional massverk & all; rperungen physicalgr & all; & w; e l & auml; nge with combinedvisual and tactile antastbaren messfl & auml; chen, with systematic ma & white; relation of bothantastverfahren, marked by the fact that they visually - tactileabtastbare messfl & auml; chenas with a oberfl & auml chenstruktur homogeneous;command, halbkugelf & all; rmigerpitting and surveys in the range of (depending on the manufacturing process)a few nanometers to about 50 micrometers and are fitted.