Physical quantity e.g. force, acquiring sensor, has heat conduction path formed across one unit so that it has thermal resistance on conduction path lesser than that of another unit in direction of application of physical quantity

摘要

The sensor has a correction circuit correcting an electrical signal generated by an acquisition unit (3) by using a temperature detected by a temperature sensor and outputting the corrected electrical signal. A heat conduction path is formed across one unit so that it has a thermal resistance on the conduction path lesser than that of another unit in the direction of application of a physical quantity e.g. force. The former unit is constituted of an insulating layer (2) and a link (20) and the latter unit is constituted of an insulating layer (4) and a case (10). The acquisition unit generates the electrical signal, when the physical quantity is applied on it.