SEMICONDUCTOR TRANSFER TRAY, BURN-IN BOARD USING THE SAME, INSPECTION APPARATUS FOR BURN-IN TEST, BURN-IN TEST METHOD, AND SEMICONDUCTOR MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor transfer tray for tests capable of collectively handling a plurality of semiconductors (IC packages etc. ) during the tests and provide a burn-in board using the same, an inspection apparatus for burn-in tests, a burn-in test method, and a semiconductor manufacturing method.;SOLUTION: By mounting the semiconductor transfer tray 40 on a housing part 27 of a housing 25 of the burn-in board 22 and closing a lid body, it is possible to mount a large number of semiconductors 10 onto the burn-in board 22. By placing the burn-in board 22 in this state in the burn-in test apparatus, it is possible to collectively test the plurality of semiconductors 10. Since the need for one-to-one correspondence between the semiconductors 10 and pairs of sockets for holding the same as before is eliminated, it is possible to inspect a larger number of semiconductors 10 at once than before.;COPYRIGHT: (C)2007,JPO&INPIT