HIGH PURITY METAL OXIDE PRECURSOR AND METHOD FOR PRODUCING HIGH PURITY METAL OXIDE

摘要

PROBLEM TO BE SOLVED: To provide a high purity metal oxide precursor produced by preventing the incorporation of impurities, and to provide a method for producing a high purity metal oxide.;SOLUTION: When the high purity metal oxide precursor is produced by water-washing a metal oxide precursor obtained by hydrolyzing a metal oxide raw material and then drying the metal oxide precursor, the high purity metal oxide precursor is produced by using ultrapure water having a resistivity of ≥17.0 MΩcm in either or both of the hydrolysis process and the water-washing process, and further, the metal oxide is produced by firing the high purity metal oxide precursor. Thereby, the incorporation of impurities into the high purity metal oxide precursor is prevented, the generation of devitrification in a product produced from the metal oxide is suppressed, and the quality of the product is enhanced.;COPYRIGHT: (C)2006,JPO&NCIPI