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Blue radiation Si: The SiO2 film the blue luminous element and the blue radiation Si which possess that: On the production mannered null
Blue radiation Si: The SiO2 film the blue luminous element and the blue radiation Si which possess that: On the production mannered null
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机译:蓝光Si:具有以下特征的SiO 2膜蓝光元素和蓝光Si:生产上无效
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摘要
PROBLEM TO BE SOLVED: To provide a new light-emitting Si:SiO2 film obtained by a very simple process without annealing treatment.;SOLUTION: The blue light-emitting film is formed on a substrate by using a target of Si and SiO2, and carrying out simultaneous sputtering of the Si and the SiO2 while regulating the volume percentage of the Si in the SiO2 based on the whole film so as to be 0.75-4.5% to form the blue light-mitting Si:SiO2 film on a substrate.;COPYRIGHT: (C)2004,JPO
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