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Method and the device for occurring the plasma which minds the electric discharge inside the discharge space

机译:注意放电空间内部放电的等离子体产生方法和装置

摘要

As for this invention, being method and the device for occurring the plasma which minds the electric discharge inside the discharge space which at least includes two electrodes, at least as for one side of the aforementioned electrode, in order the attack influence territory due to evaporation spot, to be formed at least by electric current flow, it regards method and the device which are formed from the matrix material or the carrier material. In order in order to offer the method or the device for the aforementioned occurrence of the plasma with electric discharge, the sacrifice baseplate which is in the midst of discharge operating (38) boiling point the aforementioned carrier material (30) the sacrifice baseplate which is lower than fusion point (38), the electric charge carrier which it occurs in the aforementioned electric current flow the aforementioned sacrifice baseplate (38) from to be formed mainly, it is proposed that it is provided at least in the aforementioned evaporation spot.
机译:关于本发明,至少在上述电极的一侧具有至少两个电极的放电空间内的放电中产生放电的等离子体的方法和装置,以防止由于蒸发引起的冲击影响区域至少由电流形成的光斑涉及由基质材料或载体材料形成的方法和装置。为了提供上述通过放电产生等离子体的方法或装置,处于放电操作中的牺牲基板(38)的沸点为前述载体材料(30),牺牲基板为在比熔融点(38)低的位置,主要形成在上述电流中流过的上述牺牲基板(38)所产生的电荷载体,建议至少设置在上述蒸发点上。

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