SUPERPRECISION POLISHING METHOD AND SUPERPRECISION POLISHING DEVICE

摘要

PROBLEM TO BE SOLVED: To remove protrusions present on the surface of a work and to perform shape formation even in the case of a gas cluster ion beam whose spot size is set to be equal to or below the pitch of the protrusions on the surface of the work.;SOLUTION: A source part 1 generates a gas cluster ion beam 10 as a neutral beam. A tungsten filament 6 ionizes the gas cluster ion beam 10 and emits the same toward the surface of a free curved face forming mold 12. An X-axis stage 14, a Y-axis stage 15 and a swinging stage 13 move the surface position of the free curved face forming mold 12 irradiated with the gas cluster ion beam 10. A control part 100 controls the accelerating voltage of the gas cluster ion beam 10 or the flow rate of a source gas in accordance with the surface position of the free curved face forming mold 12.;COPYRIGHT: (C)2006,JPO&NCIPI