SEMICONDUCTOR CIRCUIT, SEMICONDUCTOR CIRCUIT CHARACTERISTICS MONITORING METHOD, SEMICONDUCTOR CIRCUIT TESTING METHOD, SEMICONDUCTOR CIRCUIT TESTING DEVICE, AND SEMICONDUCTOR CIRCUIT TESTING PROGRAM

摘要

PPROBLEM TO BE SOLVED: To provide a method for easily monitoring process variations in an LSI circuit or performing sorting of products. PSOLUTION: The variations of the circuit characteristics of the LSI circuit 100 are detected, by detecting the variation in the amount of delay of a unit delay element, from a delay amount control signal of a digital DLL circuit 50 using the unit delay element 10 of a multiple stages. PCOPYRIGHT: (C)2006,JPO&NCIPI