Lot transportation system and lot transportation method

摘要

When a treatment process and an inspection process are continuous, in order to transfer a lot therebetween more simply and more reliably, in a conveying system comprising a depository storing lots each of which is one group of the same species, there is provided a plurality of treatment apparatuses for treating the lots; an inspection apparatus for inspecting the lots after treatment; an automated guided vehicle for conveying the lot by moving between the depository and the treatment apparatus; and a control computer which controls treatment processing of the lot, wherein a delivery device is disposed at an area adjacent to the inspection apparatus for conveying the lot in and out the automated guided vehicle so that a plurality of lots can be placed thereon simultaneously.