Thermal infrared detection device, method of manufacturing a thermal infrared detection element, infrared imaging systems and infrared imaging device

摘要

PROBLEM TO BE SOLVED: To prevent an infrared ray image from becoming blurred and to miniaturize a system and a device, make it two-dimensional, and improve its resolution by miniaturizing an element and forming a light reception electrode and a compensation electrode so that a thermal crosstalk can be suppressed. ;SOLUTION: A compensation electrode 44, a dielectric film 45 where polarization is generated due to the reception of infrared rays, a counter electrode 46, a dielectric film 47 with the same material, film thickness, and area as those of the dielectric film 45, and a light reception electrode 48 are successively laminated, via an insulation film 43, on an air gap 42 provided on a silicon semiconductor substrate 41 where the insulation film 43 is formed. Infrared rays can enter from an upper part in the dielectric film 47. On the other hand, infrared rays from an upper part cannot enter in the dielectric film 45. The configuration compensates for output from each light reception electrode 48 due to output from the corresponding compensation electrode 44 when infrared rays enter each light reception electrode 48.;COPYRIGHT: (C)1999,JPO