Corresponds to the size of beam spot in beam spot diameter management manner of the film thickness measurement equipment and is used for

摘要

PROBLEM TO BE SOLVED: To provide a film thickness measuring instrument which can easily and securely manage a beam spot diameter and perform the management corresponding to user specifications and a sample for beam spot diameter management used for the method.;SOLUTION: A sample 21 for beam spot diameter management, formed by forming measurement areas A corresponding to the size of a beam spot on a substrate 22 and also making films formed in the measurement areas A and films formed around the measurement areas different from each other, is irradiated with the light from a light source 5 and a spectroscope 12 measures the quantity of polarization variation of elliptic polarized light 11 reflected by the sample surface to judge whether the beam spot diameter of the light 9 is decreased to a specific value on the basis of data obtained on the basis of the measured quantity of polarization variation.;COPYRIGHT: (C)2002,JPO