Production method of the hollow type micro probe which utilizes MEMS technology and the micro probe which is by this

摘要

The hollow type micro probe which utilizes the MEMS technology due to this invention, to be possessed on the based electric conduction membrane and that based electric conduction membrane which are formed on the baseplate which fills up the conductive pad body and that conductive pad body which fill up inside the penetration hole which was formed in the baseplate and that baseplate where the penetration hole was formed to the specified section inside the penetration hole, the surface to be possessed on the outer part surface of the 1st teitsupu backing and that 1st teitsupu backing which raundeingu are done with the tilt slope which tilts in the lower part, to make the top of the 1st teitsupu backing open with opening, top of the 1st teitsupu backingteitsupu of the conductive material which is possessed on the outer part surface of the 2nd teitsupu backing and that 2nd teitsupu backing which are made to extend and, it possesses.