Implication the ultrasonic vibrator and the piezoelectric

摘要

PROBLEM TO BE SOLVED: To easily pull out a lead, and to prevent the sharp increase of manufacturing costs by including a piezoelectric body on whose upper and lower faces electrodes are formed, changing the polarization density of the piezoelectric body, and weighting in a slice direction. ;SOLUTION: A temporary electrode 12 constituted of plural band-shaped electrode elements extended along an X direction is formed on the upper face and lower face of a plate-shaped piezoelectric body 10 so that electrode density can be gradually decreased from the central part of the piezoelectric body 10 to the right and left edge parts of an Y direction by a spatter method or the like. In this case, the X direction is the longitudinal direction of the piezoelectric body 10, and made equivalent to an electronic scanning direction, and the Y direction is the slice direction of the piezoelectric body 10. Next, a DC voltage is impressed between the two temporarily electrodes 12, and a polarization processing is operated. Afterwards, the two temporarily electrodes 12 are removed by, for example, an etching processing, and a main electrode is formed instead. Thus, an ultrasonic diaphragm can be assembled by using the piezoelectric body in which the main electrode is formed.;COPYRIGHT: (C)1998,JPO