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Software mechanism for generating flexible equipment state model views, software mechanism for measuring equipment reliability
Software mechanism for generating flexible equipment state model views, software mechanism for measuring equipment reliability
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机译:用于生成灵活的设备状态模型视图的软件机制,用于测量设备可靠性的软件机制
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摘要
A state model engine according to one embodiment is configured to dynamically determine Reliability, Availability, and Maintainability data in a lithographic processing system. The engine evaluates whether state changes occur in defined state models, based on transition events published by other state models.
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