PROCESS ENGINEERING FACILITY, ESPECIALLY MICRO-PROCESS ENGINEERING FACILITY

摘要

The invention relates to process engineering facility comprising individual hardware modules that perform predetermined process engineering functions autonomously of each other, and further comprising a higher-order automation device that includes run-off controls that sequentially set desired facility statuses that can be achieved by executing control commands in the hardware modules. According to the invention, the automation device (9) transmits the respective actual desired facility status (17) to the hardware modules (e.g. 2). The control commands (19) required for achieving the different desired facility statuses (17) are stored in storage means (18) of the hardware modules (1 to 8). The hardware modules (1 to 8) execute the control commands (19) associated with the respective transmitted desired facility status (17) without involvement of the automation device (19) and report to the automation device (19) once the respective desired facility status (17) is achieved.