Chemical Mechanical Polishing Apparatus with Oil Mist Measurement Senser and Oil Condition Measurement Method using The Oil Mist Measurement Senser

摘要

A CMP apparatus equipped with an oil mist measurement sensor and an oil condition measurement method using an oil mist measurement sensor are provided to perform previously an oil exchange process by measuring the amount of oil mist included in the oil. An oil mist measurement sensor(120) is used for measuring the amount of oil mist generated from oil within a gear box(110) and outputting electrical signals according to measured values. A control unit(130) detects a measured value of oil mist according to the electrical signals outputted from the oil mist measurement sensor and compares the measured value of the oil mist with a setup value of the oil mist. An alarm unit outputs a warning message according to an output signal from the control unit.