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SOFT BAKE APPARATUS INCLUDING LIFT PINS AND METHOD FOR SOFT BAKING USING THEREOF
SOFT BAKE APPARATUS INCLUDING LIFT PINS AND METHOD FOR SOFT BAKING USING THEREOF
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机译:包括升降销的软烘烤装置以及使用其的软烘烤方法
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摘要
An apparatus for soft baking a substrate having a dummy region is provided. The apparatus includes a heating plate, a plurality of pins, and a driving unit for individually lifting selective ones of the plurality of pins so as to protrude from an upper surface of the heating plate.
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